Invention Grant
- Patent Title: Piezoelectric sensor dynamic range improvement
- Patent Title (中): 压电传感器动态范围改进
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Application No.: US12059009Application Date: 2008-03-31
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Publication No.: US08499630B2Publication Date: 2013-08-06
- Inventor: Friedel Gerfers , Li-Peng Wang
- Applicant: Friedel Gerfers , Li-Peng Wang
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
A MEMS piezoelectric sensor comprises a plurality of capacitors some of which may be used for sensing and others used for feedback. The capacitors may be switched to connect or disconnect selected capacitors from the sensor. Embodiments convert a two port sensor into a four port sensor without significant changes in hardware design and improve SNR and correct for offset and out-of-axis errors due to process mismatch and variations.
Public/Granted literature
- US20090241666A1 PIEZOELECTRIC SENSOR DYNAMIC RANGE IMPROVEMENT Public/Granted day:2009-10-01
Information query
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