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US08499630B2 Piezoelectric sensor dynamic range improvement 有权
压电传感器动态范围改进

Piezoelectric sensor dynamic range improvement
Abstract:
A MEMS piezoelectric sensor comprises a plurality of capacitors some of which may be used for sensing and others used for feedback. The capacitors may be switched to connect or disconnect selected capacitors from the sensor. Embodiments convert a two port sensor into a four port sensor without significant changes in hardware design and improve SNR and correct for offset and out-of-axis errors due to process mismatch and variations.
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