Invention Grant
US08500952B2 Plasma confinement rings having reduced polymer deposition characteristics
有权
具有降低的聚合物沉积特性的等离子体约束环
- Patent Title: Plasma confinement rings having reduced polymer deposition characteristics
- Patent Title (中): 具有降低的聚合物沉积特性的等离子体约束环
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Application No.: US13585570Application Date: 2012-08-14
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Publication No.: US08500952B2Publication Date: 2013-08-06
- Inventor: Rajinder Dhindsa , Felix Kozakevich , James H. Rogers , David Trussell
- Applicant: Rajinder Dhindsa , Felix Kozakevich , James H. Rogers , David Trussell
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Buchanan Ingersoll & Rooney PC
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C16/509 ; H01L21/306 ; H01L21/302

Abstract:
Plasma confinement ring assemblies are provided that include confinement rings adapted to reach sufficiently high temperatures on plasma-exposed surfaces of the rings to avoid polymer deposition on those surfaces. The plasma confinement rings include thermal chokes adapted to localize heating at selected portions of the rings that include the plasma exposed surfaces. The thermal chokes reduce heat conduction from those portions to other portions of the rings, which causes selected portions of the rings to reach desired temperatures during plasma processing.
Public/Granted literature
- US20120325407A1 PLASMA CONFINEMENT RINGS HAVING REDUCED POLYMER DEPOSITION CHARACTERISTICS Public/Granted day:2012-12-27
Information query
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