Invention Grant
US08501022B2 Method using block copolymers for making a master disk with radial nondata marks for nanoimprinting patterned magnetic recording disks 失效
使用嵌段共聚物制造具有用于纳米压印图案化磁记录盘的径向非标记标记的母盘的方法

Method using block copolymers for making a master disk with radial nondata marks for nanoimprinting patterned magnetic recording disks
Abstract:
A method for making a master disk for nanoimprinting patterned-media magnetic recording disks has patterns for both the data islands and the nondata regions. The method uses guided self-assembly of a block copolymer (BCP) to form patterns of generally radial lines and/or generally concentric rings as well as patterns of gap regions of one of the BCP components. The pattern of lines and/or rings have the BCP components aligned as lamellae perpendicular to the substrate, while the pattern of gap regions has the BCP components aligned as lamellae parallel to the substrate. One of the BCP components is removed, leaving the other BCP component as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.
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