Invention Grant
US08501536B2 Integrating and aligning laser chips on sliders for HAMR applications
有权
将激光芯片集成和对准用于HAMR应用的滑块
- Patent Title: Integrating and aligning laser chips on sliders for HAMR applications
- Patent Title (中): 将激光芯片集成和对准用于HAMR应用的滑块
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Application No.: US12751452Application Date: 2010-03-31
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Publication No.: US08501536B2Publication Date: 2013-08-06
- Inventor: Marcus B. Mooney , Mark Anthony Gubbins , Bredan Lafferty , Alin Mihai Fecioru
- Applicant: Marcus B. Mooney , Mark Anthony Gubbins , Bredan Lafferty , Alin Mihai Fecioru
- Applicant Address: US CA Cupertino
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Cupertino
- Agency: Hollingsworth Davis, LLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/30 ; H01L21/46 ; H01L21/50 ; H01L21/58
Abstract:
A method of producing a slider wafer populated with electromagnetic components optically aligned with photonic elements for HAMR applications. Laser chips are transferred from a laser substrate wafer to the slider wafer by a massively parallel printing transfer process. After wafer bonding the laser chips to the slider wafer, the shape and optical alignment of the photonic elements are precisely aligned en masse by lithographic processing.
Public/Granted literature
- US20110243176A1 INTEGRATING AND ALIGNING LASER CHIPS ON SLIDERS FOR HAMR APPLICATIONS Public/Granted day:2011-10-06
Information query
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