Invention Grant
- Patent Title: High-resolution integrated X-ray CMOS image sensor
- Patent Title (中): 高分辨率集成X射线CMOS图像传感器
-
Application No.: US12390169Application Date: 2009-02-20
-
Publication No.: US08501573B2Publication Date: 2013-08-06
- Inventor: Yakov Roizin , Amos Fenigstein , Avi Strum , Alexey Heiman , Doron Pardess
- Applicant: Yakov Roizin , Amos Fenigstein , Avi Strum , Alexey Heiman , Doron Pardess
- Applicant Address: IL Migdal Haemek
- Assignee: Tower Semiconductor Ltd.
- Current Assignee: Tower Semiconductor Ltd.
- Current Assignee Address: IL Migdal Haemek
- Agency: Bever, Hoffman & Harms, LLP
- Agent E. Eric Hoffman
- Main IPC: H01L31/06
- IPC: H01L31/06

Abstract:
An X-ray image sensor having scintillating material embedded into wave-guide structures fabricated in a CMOS image sensor (CIS). After the CIS has been fabricated, openings (deep pores) are formed in the back side of the CIS wafer. These openings terminate at a distance of about 1 to 5 microns below the upper silicon surface of the wafer. The depth of these openings can be controlled by stopping on a buried insulating layer, or by stopping on an epitaxial silicon layer having a distinctive doping concentration. The openings are aligned with corresponding photodiodes of the CIS. The openings may have a shape that narrows as approaching the photodiodes. A thin layer of a reflective material may be formed on the sidewalls of the openings, thereby improving the efficiency of the resulting waveguide structures. Scintillating material (e.g., CsI(Tl)) is introduced into the openings using a ForceFill™ technology or by mechanical pressing.
Public/Granted literature
- US20090181491A1 High-Resolution Integrated X-Ray CMOS Image Sensor Public/Granted day:2009-07-16
Information query
IPC分类: