Invention Grant
US08501588B2 Method for making a semiconductor structure with a buried ground plane 有权
制造具有埋地面的半导体结构的方法

Method for making a semiconductor structure with a buried ground plane
Abstract:
A method for making a semiconducting structure, including: a) forming, on a surface of a final semiconductor substrate, a semiconducting layer, doped with elements from columns III and V of the Periodic Table so as to form a ground plane, b) forming a dielectric layer, c) then assembling, by direct adhesion of the source substrate, on the final substrate, the layer forming the ground plane between the final substrate and the source substrate, the dielectric layer being between the source substrate and the ground plane, d) then thinning the source substrate, leaving, on the surface of the semiconductor structure, a film made from a semiconducting material.
Information query
Patent Agency Ranking
0/0