Invention Grant
- Patent Title: Method for making a semiconductor structure with a buried ground plane
- Patent Title (中): 制造具有埋地面的半导体结构的方法
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Application No.: US13057239Application Date: 2009-08-13
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Publication No.: US08501588B2Publication Date: 2013-08-06
- Inventor: Yannick Le Tiec , Francois Andrieu
- Applicant: Yannick Le Tiec , Francois Andrieu
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0855587 20080814
- International Application: PCT/EP2009/060474 WO 20090813
- International Announcement: WO2010/018204 WO 20100218
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L21/46 ; H01L21/76

Abstract:
A method for making a semiconducting structure, including: a) forming, on a surface of a final semiconductor substrate, a semiconducting layer, doped with elements from columns III and V of the Periodic Table so as to form a ground plane, b) forming a dielectric layer, c) then assembling, by direct adhesion of the source substrate, on the final substrate, the layer forming the ground plane between the final substrate and the source substrate, the dielectric layer being between the source substrate and the ground plane, d) then thinning the source substrate, leaving, on the surface of the semiconductor structure, a film made from a semiconducting material.
Public/Granted literature
- US20110284870A1 METHOD FOR MAKING A SEMICONDUCTOR STRUCTURE WITH A BURIED GROUND PLANE Public/Granted day:2011-11-24
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