Invention Grant
- Patent Title: Apparatus and methods for dicing interposer assembly
- Patent Title (中): 用于切割插件组件的装置和方法
-
Application No.: US13176606Application Date: 2011-07-05
-
Publication No.: US08501590B2Publication Date: 2013-08-06
- Inventor: Chung Yu Wang , Kung-Chen Yeh , Chih-Wei Wu , Szu Wei Lu , Jing-Cheng Lin
- Applicant: Chung Yu Wang , Kung-Chen Yeh , Chih-Wei Wu , Szu Wei Lu , Jing-Cheng Lin
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L21/78
- IPC: H01L21/78

Abstract:
Methods and apparatus for performing dicing of die on wafer interposers. Methods are disclosed that include receiving an interposer assembly including one or more integrated circuit dies mounted on a die side of an interposer substrate and having scribe areas defined in spaces between the integrated circuit dies, the interposer having an opposite side for receiving external connectors; mounting the die side of the interposer assembly to a tape assembly, the tape assembly comprising an adhesive tape and preformed spacers disposed between and filling gaps between the integrated circuit dies; and sawing the interposer assembly by cutting the opposite side of the interposer in the scribe areas to make cuts through the interposer, the cuts separating the interposer into one or more die on wafer assemblies. Apparatuses are disclosed for use with the methods.
Public/Granted literature
- US20130009316A1 Apparatus and Methods for Dicing Interposer Assembly Public/Granted day:2013-01-10
Information query
IPC分类: