Invention Grant
- Patent Title: Polishing liquid for metal film and polishing method
- Patent Title (中): 抛光液用于金属膜和抛光方法
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Application No.: US12668096Application Date: 2008-07-08
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Publication No.: US08501625B2Publication Date: 2013-08-06
- Inventor: Kouji Haga , Masato Fukasawa , Jin Amanokura , Hiroshi Nakagawa
- Applicant: Kouji Haga , Masato Fukasawa , Jin Amanokura , Hiroshi Nakagawa
- Applicant Address: JP Tokyo
- Assignee: Hitachi Chemical Co., Ltd.
- Current Assignee: Hitachi Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2007-180928 20070710
- International Application: PCT/JP2008/062352 WO 20080708
- International Announcement: WO2009/008431 WO 20090115
- Main IPC: C09G1/02
- IPC: C09G1/02 ; C09G1/04

Abstract:
The invention relates to a polishing liquid for metal film comprising 7.0% by weight or more of an oxidizer for metal, a water-soluble polymer, an oxidized metal dissolving agent, a metal anticorrosive agent and water, provided that the total amount of the polishing liquid for metal film is 100% by weight, wherein the water-soluble polymer has a weight average molecular weight of 150,000 or more and is at least one member selected from among a polycarboxylic acid, a salt of a polycarboxylic acid, and a polycarboxylic acid ester. According to the invention, provided is a polishing liquid for metal film, by which polishing can be performed at a high rate even under a polishing pressure as low as 1 psi or lower, and such that a polished film after polishing is excellent in planarity, furthermore, with which a high polishing rate can be obtained even in an initial stage of polishing, and provided is a polishing method using the polishing liquid.
Public/Granted literature
- US20100323584A1 POLISHING LIQUID FOR METAL FILM AND POLISHING METHOD Public/Granted day:2010-12-23
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