Invention Grant
US08502142B2 Charged particle beam analysis while part of a sample to be analyzed remains in a generated opening of the sample
有权
带电粒子束分析，而要分析的样品的一部分保留在样品的生成开口中
- Patent Title: Charged particle beam analysis while part of a sample to be analyzed remains in a generated opening of the sample
- Patent Title (中): 带电粒子束分析，而要分析的样品的一部分保留在样品的生成开口中
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Application No.: US12584992Application Date: 2009-09-15
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Publication No.: US08502142B2Publication Date: 2013-08-06
- Inventor: Ulrike Zeile , Dietmar Donitz
- Applicant: Ulrike Zeile , Dietmar Donitz
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Muirhead and Saturnelli, LLC
- Priority: DE102008042179 20080917
- Main IPC: G21K5/10
- IPC: G21K5/10 ; G01F23/00
Abstract:
A device and method for analyzing a sample provide for extracting a part to be analyzed from the sample with the aid of a previously generated opening in the sample. The part to be analyzed is examined in greater detail with the aid of a particle beam. For this purpose, the sample is placed in the opening or on a sample holder.
Public/Granted literature
- US20100133432A1 Device and method for analyzing a sample Public/Granted day:2010-06-03
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