Invention Grant
- Patent Title: Microbolometer detector layer
- Patent Title (中): 微电热计探测器层
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Application No.: US13252948Application Date: 2011-10-04
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Publication No.: US08502147B2Publication Date: 2013-08-06
- Inventor: Yaroslava Petraitis , Richard E. Bornfreund , Joseph H. Durham , Robert F. Cannata
- Applicant: Yaroslava Petraitis , Richard E. Bornfreund , Joseph H. Durham , Robert F. Cannata
- Applicant Address: US OR Wilsonville
- Assignee: Flir Systems, Inc.
- Current Assignee: Flir Systems, Inc.
- Current Assignee Address: US OR Wilsonville
- Agency: Haynes and Boone, LLP
- Main IPC: H01L25/00
- IPC: H01L25/00
Abstract:
A microbolometer is disclosed, including a bottom dielectric of a bridge structure; a detector layer disposed above the bottom dielectric, the detector layer comprised of a metal-doped vanadium pentaoxide material; and a top dielectric disposed above the detector layer.
Public/Granted literature
- US20130082178A1 MICROBOLOMETER DETECTOR LAYER Public/Granted day:2013-04-04
Information query
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