Invention Grant
- Patent Title: Pyroelectric detector, pyroelectric detection device, and electronic instrument
- Patent Title (中): 热电探测器,热电检测装置和电子仪器
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Application No.: US13371655Application Date: 2012-02-13
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Publication No.: US08502150B2Publication Date: 2013-08-06
- Inventor: Takafumi Noda
- Applicant: Takafumi Noda
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Global IP Counselors, LLP
- Priority: JP2011-037959 20110224
- Main IPC: G01J5/00
- IPC: G01J5/00

Abstract:
A pyroelectric detector includes a substrate, a support member, a spacer member, and a pyroelectric detecting element. The spacer member supports the support member over the substrate with a cavity part being formed therebetween. The pyroelectric detecting element includes a first electrode mounted on the support member, a second electrode, and a pyroelectric body between the first and second electrodes. The first electrode includes a first region on which the pyroelectric body is layered, and a second region protruding from the first region in plan view. The support member includes an insulating layer, a first wiring layer disposed on the second surface side of the insulating layer, and a first plug passing through the insulating layer at a position where the first wiring layer and the second region of the first electrode overlap in plan view to connect the first wiring layer with the first electrode.
Public/Granted literature
- US20120217400A1 PYROELECTRIC DETECTOR, PYROELECTRIC DETECTION DEVICE, AND ELECTRONIC INSTRUMENT Public/Granted day:2012-08-30
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