Invention Grant
US08502183B2 Semiconductor memory device including memory cell having rectifying element and switching element 有权
半导体存储器件包括具有整流元件和开关元件的存储单元

Semiconductor memory device including memory cell having rectifying element and switching element
Abstract:
According to one embodiment, a semiconductor memory device includes a first conductive line, a second conductive line, a rectifying element, a switching element, a first side wall film and a second side wall film. The first conductive line extends in a first direction. The second conductive line extends in a second direction crossing the first direction. The rectifying element is connected between the first and second conductive lines. The switching element is connected in series with the rectifying element between the first and second conductive lines. The first side wall film is formed on a side surface of the rectifying element. The second side wall film is formed on a side surface of at least one of the first and second conductive lines. At least one of a film type and a film thickness of the second side wall film is different from that of the first side wall film.
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