Invention Grant
- Patent Title: Non-volatile semiconductor memory device
- Patent Title (中): 非易失性半导体存储器件
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Application No.: US13232492Application Date: 2011-09-14
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Publication No.: US08502300B2Publication Date: 2013-08-06
- Inventor: Ryo Fukuda , Yoshihisa Iwata
- Applicant: Ryo Fukuda , Yoshihisa Iwata
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-212479 20100922
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
An dielectric film is formed above the semiconductor substrate. A first conductive layer is formed in the dielectric film and extending in a first direction. The first conductive layer is connected to a first select transistor. A second conductive layer formed in the dielectric film and extending in the first direction. The second conductive layer is connected to a second select transistor. A semiconductor layer is connected to both the first and second conductive layers and functioning as a channel layer of a memory transistor. A gate-insulating film is formed on the semiconductor layer. The gate-insulating film includes a charge accumulation film as a portion thereof. A third conductive layer is surrounded by the gate-insulating film.
Public/Granted literature
- US20120068256A1 NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2012-03-22
Information query
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