Invention Grant
US08502335B2 CMOS image sensor big via bonding pad application for AlCu Process
有权
CMOS图像传感器大通过AlCu工艺的焊盘应用
- Patent Title: CMOS image sensor big via bonding pad application for AlCu Process
- Patent Title (中): CMOS图像传感器大通过AlCu工艺的焊盘应用
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Application No.: US12616652Application Date: 2009-11-11
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Publication No.: US08502335B2Publication Date: 2013-08-06
- Inventor: Uway Tseng , Lin-June Wu , Yu-Ting Lin
- Applicant: Uway Tseng , Lin-June Wu , Yu-Ting Lin
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L31/00
- IPC: H01L31/00

Abstract:
An integrated circuit includes a substrate having a bonding pad region and a non-bonding pad region. A relatively large via, called a “big via,” is formed on the substrate in the bonding region. The big via has a first dimension in a top view toward the substrate. The integrated circuit also includes a plurality of vias formed on the substrate in the non-bonding region. The plurality of vias each have a second dimension in the top view, the second dimension being substantially less than the first dimension.
Public/Granted literature
- US20110024867A1 CMOS IMAGE SENSOR BIG VIA BONDING PAD APPLICATION FOR AlCu PROCESS Public/Granted day:2011-02-03
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