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US08502335B2 CMOS image sensor big via bonding pad application for AlCu Process 有权
CMOS图像传感器大通过AlCu工艺的焊盘应用

CMOS image sensor big via bonding pad application for AlCu Process
Abstract:
An integrated circuit includes a substrate having a bonding pad region and a non-bonding pad region. A relatively large via, called a “big via,” is formed on the substrate in the bonding region. The big via has a first dimension in a top view toward the substrate. The integrated circuit also includes a plurality of vias formed on the substrate in the non-bonding region. The plurality of vias each have a second dimension in the top view, the second dimension being substantially less than the first dimension.
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