Invention Grant
US08502392B2 Semiconductor device with partially-etched conductive layer recessed within substrate for bonding to semiconductor die
有权
半导体器件具有凹陷在衬底内的部分蚀刻的导电层,用于接合到半导体管芯
- Patent Title: Semiconductor device with partially-etched conductive layer recessed within substrate for bonding to semiconductor die
- Patent Title (中): 半导体器件具有凹陷在衬底内的部分蚀刻的导电层,用于接合到半导体管芯
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Application No.: US13606631Application Date: 2012-09-07
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Publication No.: US08502392B2Publication Date: 2013-08-06
- Inventor: KyuWon Lee , HyunSu Shin , Hun Jeong , JinGwan Kim , SunYoung Chun
- Applicant: KyuWon Lee , HyunSu Shin , Hun Jeong , JinGwan Kim , SunYoung Chun
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins & Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
A semiconductor device has a substrate with a die attach area. A conductive layer is formed over a surface of the substrate and extending below the surface. An insulating layer is formed over the surface of the substrate outside the die attach area. A portion of the conductive layer is removed within the die attach area to expose sidewalls of the substrate. The remaining portion of the conductive layer is recessed below the surface of the substrate within the die attach area. A semiconductor die has bumps formed over its active surface. The semiconductor die is mounted to the substrate by bonding the bumps to the remaining portion of the first conductive layer recessed below the first surface of the substrate. The sidewalls of the substrate retain the bumps during bonding to the remaining portion of the conductive layer. An encapsulant is deposited between the semiconductor die and substrate.
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