Invention Grant
- Patent Title: Pulse to pulse energy equalization of light beam intensity
- Patent Title (中): 脉冲到脉冲能量均衡的光束强度
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Application No.: US13447695Application Date: 2012-04-16
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Publication No.: US08502957B2Publication Date: 2013-08-06
- Inventor: Muhammad Arif
- Applicant: Muhammad Arif
- Applicant Address: NL Veldhoven
- Assignee: ASML Holding N.V.
- Current Assignee: ASML Holding N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G02F1/29
- IPC: G02F1/29 ; G03B27/32 ; G03B27/42 ; G03B27/54 ; H01S3/13

Abstract:
A system for equalizing pulse to pulse energy of a light beam includes a group of optical devices including an optical device configured to exhibit nonlinear properties, e.g., higher order or third order nonlinear properties. Transmission properties of an unequalized light beam passing through the group of optical devices change such that an output intensity of a resulting light beam output from the optical devices is equalized. One example configuration includes at least first and second prisms having nonlinear properties, i.e., higher order or third order, and configured as a beam steering system.
Public/Granted literature
- US20120200839A1 Pulse to Pulse Energy Equalization of Light Beam Intensity Public/Granted day:2012-08-09
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