Invention Grant
- Patent Title: Positioning device, lithographic apparatus using same, and device manufacturing method
- Patent Title (中): 定位装置,使用其的光刻装置和装置制造方法
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Application No.: US12791432Application Date: 2010-06-01
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Publication No.: US08502958B2Publication Date: 2013-08-06
- Inventor: Yoshinori Makita
- Applicant: Yoshinori Makita
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- Priority: JP2009-135052 20090604; JP2010-103548 20100428
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03B27/42 ; H02K41/02 ; G03F7/20

Abstract:
The present invention provides a positioning device for positioning a table, including a base, a motor that drives the table in the driving area on the base, a position sensor that detects the position of the table, and a control unit that controls the motor. The control unit includes a first output unit that outputs electric current for controlling the position of the table based on the output of the position sensor; a second output unit that outputs electric current for imparting a thrust force, which is directed toward the center of the driving area, to the table; and a switch unit that switches from a state in which the motor is controlled depending on the output of the first output unit to a state in which the motor is controlled depending on the output of the second output unit, based on a stopping signal for stopping the table.
Public/Granted literature
- US20100309451A1 POSITIONING DEVICE, LITHOGRAPHIC APPARATUS USING SAME, AND DEVICE MANUFACTURING METHOD Public/Granted day:2010-12-09
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