Invention Grant
US08502958B2 Positioning device, lithographic apparatus using same, and device manufacturing method 有权
定位装置,使用其的光刻装置和装置制造方法

Positioning device, lithographic apparatus using same, and device manufacturing method
Abstract:
The present invention provides a positioning device for positioning a table, including a base, a motor that drives the table in the driving area on the base, a position sensor that detects the position of the table, and a control unit that controls the motor. The control unit includes a first output unit that outputs electric current for controlling the position of the table based on the output of the position sensor; a second output unit that outputs electric current for imparting a thrust force, which is directed toward the center of the driving area, to the table; and a switch unit that switches from a state in which the motor is controlled depending on the output of the first output unit to a state in which the motor is controlled depending on the output of the second output unit, based on a stopping signal for stopping the table.
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