Invention Grant
US08502961B2 Exposure method, exposure apparatus, and method of manufacturing device
有权
曝光方法,曝光装置和制造装置的方法
- Patent Title: Exposure method, exposure apparatus, and method of manufacturing device
- Patent Title (中): 曝光方法,曝光装置和制造装置的方法
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Application No.: US12828803Application Date: 2010-07-01
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Publication No.: US08502961B2Publication Date: 2013-08-06
- Inventor: Kentarou Kawanami
- Applicant: Kentarou Kawanami
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2009-158196 20090702
- Main IPC: G03B27/32
- IPC: G03B27/32 ; G03B27/68 ; G03B27/52 ; G03B27/42 ; G03B27/54

Abstract:
An exposure method comprises a calculation step of calculating a correction amount of a correction unit which corrects a change in imaging characteristics of a projection optical system based on at least one of parameters including a numerical aperture and effective light source of an illumination optical system, a numerical aperture of the projection optical system, and a size and pitch of a pattern, and an amount of change in environment condition in the projection optical system; and a correction step of making the correction unit operate in accordance with the correction amount calculated in the calculation step.
Public/Granted literature
- US20110001956A1 EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE Public/Granted day:2011-01-06
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