Invention Grant
US08502961B2 Exposure method, exposure apparatus, and method of manufacturing device 有权
曝光方法,曝光装置和制造装置的方法

Exposure method, exposure apparatus, and method of manufacturing device
Abstract:
An exposure method comprises a calculation step of calculating a correction amount of a correction unit which corrects a change in imaging characteristics of a projection optical system based on at least one of parameters including a numerical aperture and effective light source of an illumination optical system, a numerical aperture of the projection optical system, and a size and pitch of a pattern, and an amount of change in environment condition in the projection optical system; and a correction step of making the correction unit operate in accordance with the correction amount calculated in the calculation step.
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