Invention Grant
- Patent Title: Computer readable storage medium including effective light source calculation program, and exposure method
- Patent Title (中): 包括有效光源计算程序和曝光方法的计算机可读存储介质
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Application No.: US12945775Application Date: 2010-11-12
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Publication No.: US08502962B2Publication Date: 2013-08-06
- Inventor: Miyoko Kawashima , Kenji Yamazoe , Hironobu Fujishima
- Applicant: Miyoko Kawashima , Kenji Yamazoe , Hironobu Fujishima
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2009-265530 20091120; JP2010-240106 20101026
- Main IPC: G03B27/32
- IPC: G03B27/32 ; G03B27/54 ; G03B27/72 ; G03F7/20

Abstract:
A storage medium includes a program which causes a computer to execute a method of calculating a light intensity distribution on a pupil plane of an illumination optical system. The method includes: determining an impulse response function of a projection optical system by performing Fourier transform on a pupil function of the projection optical system; setting a length to a second zero point of the impulse response function as a response length, extracting, from elements forming a target pattern, only elements inside am area within radius which is response length, and determining a function indicating the extracted pattern as an image function; and obtaining the light intensity distribution based on the pupil function, the determined impulse response function, and the determined image function.
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