Invention Grant
US08502962B2 Computer readable storage medium including effective light source calculation program, and exposure method 失效
包括有效光源计算程序和曝光方法的计算机可读存储介质

Computer readable storage medium including effective light source calculation program, and exposure method
Abstract:
A storage medium includes a program which causes a computer to execute a method of calculating a light intensity distribution on a pupil plane of an illumination optical system. The method includes: determining an impulse response function of a projection optical system by performing Fourier transform on a pupil function of the projection optical system; setting a length to a second zero point of the impulse response function as a response length, extracting, from elements forming a target pattern, only elements inside am area within radius which is response length, and determining a function indicating the extracted pattern as an image function; and obtaining the light intensity distribution based on the pupil function, the determined impulse response function, and the determined image function.
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