Invention Grant
- Patent Title: Lightwave interference measurement apparatus that calculates absolute distance using lightwave interference
- Patent Title (中): 使用光波干扰计算绝对距离的光波干涉测量装置
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Application No.: US13037849Application Date: 2011-03-01
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Publication No.: US08502986B2Publication Date: 2013-08-06
- Inventor: Yusuke Koda , Yoshiyuki Kuramoto
- Applicant: Yusuke Koda , Yoshiyuki Kuramoto
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2010-043690 20100301
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
A lightwave interference measurement apparatus includes a wavelength-variable laser which periodically performs wavelength scanning between first and second reference wavelengths to emit light beam, a wavelength-fixed laser which emits light beam having a third reference wavelength, a light beam splitting element which splits the light beams into reference light beam and light beam under test, a phase detector which detects a phase based on an interference signal of the reference light beam and the light beam under test, and an analyzer which sequentially determines an interference order of the third reference wavelength based on the third reference wavelength, first and second synthetic wavelengths, an integer component of a phase change amount in the wavelength scanning, and interference orders of the first and second synthetic wavelengths, and calculates an absolute distance between the surface under test and the reference surface.
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