Invention Grant
US08502987B1 Method and apparatus for measuring near-angle scattering of mirror coatings
失效
用于测量镜面涂层的近角散射的方法和装置
- Patent Title: Method and apparatus for measuring near-angle scattering of mirror coatings
- Patent Title (中): 用于测量镜面涂层的近角散射的方法和装置
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Application No.: US13018672Application Date: 2011-02-01
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Publication No.: US08502987B1Publication Date: 2013-08-06
- Inventor: Russell A. Chipman , Brian J. Daugherty , Stephen C. McClain , Steven A. Macenka
- Applicant: Russell A. Chipman , Brian J. Daugherty , Stephen C. McClain , Steven A. Macenka
- Applicant Address: US DC Washington
- Assignee: The United States of America as Represented by the Administrator of the National Aeronautics and Space Administration
- Current Assignee: The United States of America as Represented by the Administrator of the National Aeronautics and Space Administration
- Current Assignee Address: US DC Washington
- Agent Mark Homer
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
Disclosed herein is a method of determining the near angle scattering of a sample reflective surface comprising the steps of: a) splitting a beam of light having a coherence length of greater than or equal to about 2 meters into a sample beam and a reference beam; b) frequency shifting both the sample beam and the reference beam to produce a fixed beat frequency between the sample beam and the reference beam; c) directing the sample beam through a focusing lens and onto the sample reflective surface, d) reflecting the sample beam from the sample reflective surface through a detection restriction disposed on a movable stage; e) recombining the sample beam with the reference beam to form a recombined beam, followed by f) directing the recombined beam to a detector and performing heterodyne analysis on the recombined beam to measure the near-angle scattering of the sample reflective surface, wherein the position of the detection restriction relative to the sample beam is varied to occlude at least a portion of the sample beam to measure the near-angle scattering of the sample reflective surface. An apparatus according to the above method is also disclosed.
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