Invention Grant
- Patent Title: Pattern inspection apparatus and pattern inspection method
- Patent Title (中): 图案检验装置和图案检验方法
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Application No.: US12835271Application Date: 2010-07-13
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Publication No.: US08502988B2Publication Date: 2013-08-06
- Inventor: Yusaku Konno
- Applicant: Yusaku Konno
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-212887 20090915; JP2009-272132 20091130
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B9/02

Abstract:
According to one embodiment, a pattern inspection apparatus includes a light source, a beam splitter, a first optical system, a second optical system, a controller, a phase controller and a detector. The beam splitter splits an emitted light into first and second optical paths. The first optical system delivers the light to a first pattern and delivers a first reflected light from the first pattern. The second optical system delivers the light to a second pattern and delivers a second reflected light from the second pattern. The controller is provided on the optical path, and intensities of the first and second reflected lights are substantially equal. The phase controller is provided on the optical path, and phases of the first and second reflected lights are inverted. In addition, the detector detects a light that the first and second reflected lights are made to interfere with each other.
Public/Granted literature
- US20110063621A1 PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD Public/Granted day:2011-03-17
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