Invention Grant
- Patent Title: Protection device for solid state laser
- Patent Title (中): 固态激光器保护装置
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Application No.: US13323278Application Date: 2011-12-12
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Publication No.: US08503497B2Publication Date: 2013-08-06
- Inventor: Oleg Serebryanov , Alexander Goldin , Abhilash J. Mayur , Leonid M. Tertitski
- Applicant: Oleg Serebryanov , Alexander Goldin , Abhilash J. Mayur , Leonid M. Tertitski
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01S3/00
- IPC: H01S3/00

Abstract:
Embodiments provide systems, devices, and methods for controlling a laser. The system includes a controller to control a laser, a ramp generator to ramp down laser power, the ramp generator electrically coupled with the controller and coupleable with the laser, and a hardware protection system electrically coupled with the ramp generator, wherein the ramp generator monitors signals sent from the controller and the hardware protection system to the ramp generator to detect signal failure and ramps down the laser power upon signal failure detection. The method includes sending a control status signal from a controller for a laser to a ramp generator, monitoring the control status signal for missing pulses, sending a hardware interlock status signal from a hardware protection system to the ramp generator, monitoring the hardware interlock status signal for signal failure, and ramping down laser power upon detection of missing pulses or signal failure.
Public/Granted literature
- US20120170603A1 PROTECTION DEVICE FOR SOLID STATE LASER Public/Granted day:2012-07-05
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