Invention Grant
US08503699B2 Plate, transducer and methods for making and operating a transducer
有权
板,传感器和制造和操作传感器的方法
- Patent Title: Plate, transducer and methods for making and operating a transducer
- Patent Title (中): 板,传感器和制造和操作传感器的方法
-
Application No.: US13150972Application Date: 2011-06-01
-
Publication No.: US08503699B2Publication Date: 2013-08-06
- Inventor: Alfons Dehe
- Applicant: Alfons Dehe
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A plate, a transducer, a method for making a transducer, and a method for operating a transducer are disclosed. An embodiment comprises a plate comprising a first material layer comprising a first stress, a second material layer arranged beneath the first material layer, the second material layer comprising a second stress, an opening arranged in the first material layer and the second material layer, and an extension extending into opening, wherein the extension comprises a portion of the first material layer and a portion of the second material layer, and wherein the extension is curved away from a top surface of the plate based on a difference in the first stress and the second stress.
Public/Granted literature
- US20120308053A1 Plate, Transducer and Methods for Making and Operating a Transducer Public/Granted day:2012-12-06
Information query
IPC分类: