Invention Grant
- Patent Title: Method and mass flow controller for enhanced operating range
- Patent Title (中): 方法和质量流量控制器,提高工作范围
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Application No.: US12757582Application Date: 2010-04-09
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Publication No.: US08504311B2Publication Date: 2013-08-06
- Inventor: Alexei V. Smirnov , Michael J. Zolock
- Applicant: Alexei V. Smirnov , Michael J. Zolock
- Applicant Address: JP Tokyo
- Assignee: Hitachi Metals, Ltd.
- Current Assignee: Hitachi Metals, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Neugeboren O'Dowd PC
- Main IPC: G01F25/00
- IPC: G01F25/00

Abstract:
A mass flow controller (MFC), a method for calibrating an MFC, and a method for operating an MFC are disclosed. The method for calibrating the MFC includes obtaining data relative to two signals from a thermal mass flow sensor when operating the mass flow controller at different flow rates with a calibration gas, and storing the data relating to the two signals in connection with corresponding flow-rate values. The method for operating the MFC includes obtaining data relative to the two signals from the thermal mass flow controller and accessing the calibration data to determine an unknown flow rate for a process gas that may be the same gas as the calibration gas or may be another gas that is different from the calibration gas.
Public/Granted literature
- US20110247390A1 METHOD AND MASS FLOW CONTROLLER FOR ENHANCED OPERATING RANGE Public/Granted day:2011-10-13
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