Invention Grant
US08504951B2 Dose-data generating apparatus, dose-data generating method, and manufacturing method of semiconductor device
有权
剂量数据生成装置，剂量数据生成方法以及半导体装置的制造方法
- Patent Title: Dose-data generating apparatus, dose-data generating method, and manufacturing method of semiconductor device
- Patent Title (中): 剂量数据生成装置，剂量数据生成方法以及半导体装置的制造方法
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Application No.: US13168215Application Date: 2011-06-24
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Publication No.: US08504951B2Publication Date: 2013-08-06
- Inventor: Yosuke Okamoto , Takashi Koike
- Applicant: Yosuke Okamoto , Takashi Koike
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2010-204437 20100913
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/00 ; G03C5/00
Abstract:
According to one embodiment, generating virtual data by mirroring data based on a dimension measurement result in a measurement region on an inner side of a shot region to a non-shot region on an outer side of a shot edge, and calculating dose data of the measurement region and a non-measurement region based on data in the measurement region and the virtual data are included.
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