Invention Grant
- Patent Title: Cantilever excitation device and scanning probe microscope
- Patent Title (中): 悬臂激励装置和扫描探针显微镜
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Application No.: US13388504Application Date: 2010-08-06
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Publication No.: US08505111B2Publication Date: 2013-08-06
- Inventor: Hitoshi Asakawa , Takeshi Fukuma
- Applicant: Hitoshi Asakawa , Takeshi Fukuma
- Applicant Address: JP Ishikawa
- Assignee: National University Corporation Kanazawa University
- Current Assignee: National University Corporation Kanazawa University
- Current Assignee Address: JP Ishikawa
- Agency: Pearne & Gordon LLP
- Priority: JP2009-183723 20090806
- International Application: PCT/JP2010/004973 WO 20100806
- International Announcement: WO2011/016256 WO 20110210
- Main IPC: G01Q70/04
- IPC: G01Q70/04

Abstract:
Provided is a cantilever excitation device capable of preventing complication of resonance characteristics by a simple configuration. A cantilever excitation device (1) is provided with a cantilever (7), a cantilever holder (3) for holding the cantilever (7), and a piezoelectric vibrator (5) attached to the cantilever holder (3). The cantilever holder (3) includes a holder main part (11) (first part) having an acoustic impedance different from that of the piezoelectric vibrator (5) for transmitting vibration of the piezoelectric vibrator by elastic deformation and an attachment piece (13) (second part) having the acoustic impedance different from that of the first part for forming a material boundary to block propagation of an acoustic wave between the same and the first part. The first and second parts are interposed between the piezoelectric vibrator (5) and the cantilever (7).
Public/Granted literature
- US20120192320A1 CANTILEVER EXCITATION DEVICE AND SCANNING PROBE MICROSCOPE Public/Granted day:2012-07-26
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