Invention Grant
- Patent Title: Out-of plane comb-drive accelerometer
- Patent Title (中): 平面梳驱动加速度计
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Application No.: US12709184Application Date: 2010-02-19
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Publication No.: US08505380B2Publication Date: 2013-08-13
- Inventor: Michael Foster
- Applicant: Michael Foster
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agency: Lowe Graham Jones PLLC
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/00

Abstract:
An out-of-plane comb-drive accelerometer. An example accelerometer linearizes a response. An example accelerometer includes one or more stators having a plurality of tines having a surface parallel to a surface of substrate. The tine surface is at a first distance from the surface of the substrate. A proof mass includes one or more rotors that include a plurality of rotor tines attached to an edge of the proof mass. The rotor tines are interleaved with corresponding ones of the stator tines. The rotor tines include a surface parallel to a surface of the substrate. The rotor tine surface is at a second distance from the surface of the substrate. The first distance and second distance are unequal by a threshold amount. Motion of the rotor relative to the stator in an out-of-plane direction provides a linear change in a capacitive value measured across the rotor and the stator.
Public/Granted literature
- US20110203372A1 OUT-OF-PLANE COMB-DRIVE ACCELEROMETER Public/Granted day:2011-08-25
Information query
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