Invention Grant
- Patent Title: Capacitive acceleration sensor
- Patent Title (中): 电容式加速度传感器
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Application No.: US12758342Application Date: 2010-04-12
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Publication No.: US08505381B2Publication Date: 2013-08-13
- Inventor: Yasuo Yamaguchi , Makio Horikawa
- Applicant: Yasuo Yamaguchi , Makio Horikawa
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-167637 20090716
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
A capacitive acceleration sensor includes an acceleration sensor moving part and an acceleration sensor stationary part together forming a capacitor for detecting acceleration, a sealing structure hermetically enclosing but not contacting the acceleration sensor moving part, and at least one support pillar enclosed by but not directly contacted by the acceleration sensor moving part, both ends of the at least one support pillar being in contact with inside walls of the sealing structure. The acceleration sensor moving part is electrically connected to the at least one support pillar.
Public/Granted literature
- US20110011182A1 CAPACITIVE ACCELERATION SENSOR Public/Granted day:2011-01-20
Information query
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