Invention Grant
US08506039B2 Flow-through ejection system including compliant membrane transducer 有权
流通喷射系统包括柔性膜传感器

Flow-through ejection system including compliant membrane transducer
Abstract:
A liquid dispenser includes a substrate. A first portion of the substrate defines a liquid dispensing channel including an outlet opening. A second portion of the substrate defines a liquid supply channel and a liquid return channel. A liquid supply provides a continuous flow of liquid from the liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. A diverter member, positioned on a wall of the liquid dispensing channel that includes the outlet opening, is selectively actuatable to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel. The diverter member includes a MEMS transducing member anchored to the wall of the liquid dispensing channel. A compliant membrane is positioned in contact with the MEMS transducing member.
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