Invention Grant
- Patent Title: System and method for in-situ inspection during metallurgical cross-sectioning
- Patent Title (中): 冶金横截面现场检查系统及方法
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Application No.: US12651798Application Date: 2010-01-04
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Publication No.: US08506355B1Publication Date: 2013-08-13
- Inventor: Joseph Martin Patterson
- Applicant: Joseph Martin Patterson
- Applicant Address: US CA Sunnyvale
- Assignee: Applied Micro Circuits Corporation
- Current Assignee: Applied Micro Circuits Corporation
- Current Assignee Address: US CA Sunnyvale
- Agency: Turocy & Watson, LLP
- Main IPC: B24B49/00
- IPC: B24B49/00

Abstract:
A system and method are provided for in-situ inspection optical inspection during a parallel polishing process. The method provides a polishing device with a spindle bit for holding a metallurgical sample, and a rotatable wheel having an inner diameter with a top surface for accepting a polishing compound and a transparent outer diameter. An optical system underlies the wheel outer diameter for recording images of the metallurgical sample. The method polishes the metallurgical sample against the wheel inner diameter. Without releasing the metallurgical sample from the spindle bit, the metallurgical sample is moved to a first position overlying the wheel outer diameter, and the metallurgical sample is optically inspected. In one aspect, the polishing device has a cleaning system overlying the wheel outer diameter, and the method sprays the wheel outer diameter with cleaning solution to support an in-situ inspection.
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