Invention Grant
US08507031B2 Method for producing at least one microcomponent with a single mask
有权
用单个掩模制备至少一个微组件的方法
- Patent Title: Method for producing at least one microcomponent with a single mask
- Patent Title (中): 用单个掩模制备至少一个微组件的方法
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Application No.: US12796922Application Date: 2010-06-09
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Publication No.: US08507031B2Publication Date: 2013-08-13
- Inventor: Steve Martin , Nicolas Dunoyer , Sami Oukassi , Raphael Salot
- Applicant: Steve Martin , Nicolas Dunoyer , Sami Oukassi , Raphael Salot
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Oliff & Berridge, PLC
- Priority: FR0902785 20090609
- Main IPC: B05D5/12
- IPC: B05D5/12

Abstract:
The microcomponent, for example a microbattery, comprising a stack with at least two superposed layers on a substrate, is made using a single steel mask able to expand under the effect of temperature. The mask comprises at least one off-centered opening. The mask being at a first temperature, a first layer is deposited through the opening of the mask. The mask being at a second temperature, higher than the first temperature, a second layer is deposited through the opening of the mask. Finally, the mask being at a third temperature, higher than the second temperature, a third layer is deposited through the opening of the mask.
Public/Granted literature
- US20100310758A1 METHOD FOR PRODUCING AT LEAST ONE MICROCOMPONENT WITH A SINGLE MASK Public/Granted day:2010-12-09
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