Invention Grant
- Patent Title: Thin film transistor
- Patent Title (中): 薄膜晶体管
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Application No.: US12845057Application Date: 2010-07-28
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Publication No.: US08507330B2Publication Date: 2013-08-13
- Inventor: Chunmei Wang , Wei Beng Ng , Takehisa Ishida
- Applicant: Chunmei Wang , Wei Beng Ng , Takehisa Ishida
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Dentons US LLP
- Priority: SG200905283-8 20090805
- Main IPC: H01L21/84
- IPC: H01L21/84

Abstract:
A method is proposed for producing a thin-film transistor (TFT), the method comprising forming a substrate, applying a ZnO-based precursor solution onto the substrate to form a ZnO-based channel layer, annealing the channel layer, forming a source electrode and a drain electrode on the channel layer, forming a dielectric layer on the channel layer and forming a gate electrode on the dielectric layer.
Public/Granted literature
- US20110031490A1 THIN FILM TRANSISTOR Public/Granted day:2011-02-10
Information query
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