Invention Grant
US08507332B2 Method for manufacturing components 有权
组件制造方法

  • Patent Title: Method for manufacturing components
  • Patent Title (中): 组件制造方法
  • Application No.: US13143170
    Application Date: 2010-02-11
  • Publication No.: US08507332B2
    Publication Date: 2013-08-13
  • Inventor: Gregory RiouDidier Landru
  • Applicant: Gregory RiouDidier Landru
  • Applicant Address: FR Bernin
  • Assignee: Soitec
  • Current Assignee: Soitec
  • Current Assignee Address: FR Bernin
  • Agency: TraskBritt
  • Priority: FR0951156 20090224
  • International Application: PCT/EP2010/051701 WO 20100211
  • International Announcement: WO2010/097294 WO 20100902
  • Main IPC: H01L21/762
  • IPC: H01L21/762 H01L27/04
Method for manufacturing components
Abstract:
A method for manufacturing components on a mixed substrate. The method comprises the following steps: providing a substrate of the semiconductor-on-insulator (SeOI) type comprising a buried oxide layer between a supporting substrate and a thin layer, forming in this substrate a plurality of trenches opening out at a free surface of the thin layer and extending over a depth such that each trench passes through the thin layer and the buried oxide layer, these primary trenches delimiting at least one island of the SeOI substrate, forming a mask inside the primary trenches and as a layer covering the areas of the free surface of the thin layer located outside the islands, proceeding with heat treatment for dissolving the buried oxide layer present at the island, so as to reduce the thickness thereof.
Public/Granted literature
Information query
Patent Agency Ranking
0/0