Invention Grant
- Patent Title: Method for forming metal gate and MOS transistor
- Patent Title (中): 金属栅极和MOS晶体管的形成方法
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Application No.: US13176678Application Date: 2011-07-05
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Publication No.: US08507336B2Publication Date: 2013-08-13
- Inventor: Li Jiang , Mingqi Li
- Applicant: Li Jiang , Mingqi Li
- Applicant Address: CN Beijing
- Assignee: Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN201010571163 20101202
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/28

Abstract:
The invention provides a method for forming a metal gate and a method for forming a MOS transistor. The method for forming a metal gate includes: providing a substrate; forming a sacrificial oxide layer and a polysilicon gate on the substrate; forming a silicon oxide layer on sidewalls of the sacrificial oxide layer and the polysilicon gate; forming a stop layer that covers the substrate; removing a part of the stop layer in the spacers; forming a second interlayer dielectric layer that covers the first interlayer dielectric layer, the spacers and the polysilicon gate; polishing the second interlayer dielectric layer to expose the spacers and the polysilicon gate; removing the polysilicon gate to form a trench; removing the sacrificial oxide layer in the trench; and forming a metal gate in the trench. The invention prevents from recesses and therefore metal bridge and metal residuals in the recesses.
Public/Granted literature
- US20120142150A1 METHOD FOR FORMING METAL GATE AND MOS TRANSISTOR Public/Granted day:2012-06-07
Information query
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