Invention Grant
US08507349B2 Semiconductor device employing fin-type gate and method for manufacturing the same 有权
采用鳍型栅极的半导体器件及其制造方法

  • Patent Title: Semiconductor device employing fin-type gate and method for manufacturing the same
  • Patent Title (中): 采用鳍型栅极的半导体器件及其制造方法
  • Application No.: US12842598
    Application Date: 2010-07-23
  • Publication No.: US08507349B2
    Publication Date: 2013-08-13
  • Inventor: Seung Hyun Lee
  • Applicant: Seung Hyun Lee
  • Applicant Address: KR Icheon
  • Assignee: Hynix Semiconductor Inc
  • Current Assignee: Hynix Semiconductor Inc
  • Current Assignee Address: KR Icheon
  • Priority: KR10-2009-0117118 20091130
  • Main IPC: H01L21/336
  • IPC: H01L21/336
Semiconductor device employing fin-type gate and method for manufacturing the same
Abstract:
A semiconductor device comprises an active region having an upper portion and a sidewall portion which are protruded from the top surface of a device isolation region, and a silicide film disposed in the upper portion and the sidewall portion of the active region, thereby effectively reducing resistance in a source/drain region of the semiconductor device. As a result, the entire resistance of the semiconductor device comprising a fin-type gate can be reduced to improve characteristics of the semiconductor device.
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