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US08507382B2 Systems and methods for delivery of fluid-containing process material combinations 失效
用于输送含流体的工艺材料组合的系统和方法

Systems and methods for delivery of fluid-containing process material combinations
Abstract:
Common sources of different (e.g., concentrated) process materials are controllably supplied to multiple blending manifolds associated with multiple process tools, processing stations, or other points of use, to create an independently controllable process material blend for each tool, station, or point of use. Multi-constituent process materials may be circulated from a supply container through a blending manifold to a return container to ensure homogeneity until immediately prior to blending and use. Such containers may include liner-based containers adapted for pressure dispensation.
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