Invention Grant
US08507382B2 Systems and methods for delivery of fluid-containing process material combinations
失效
用于输送含流体的工艺材料组合的系统和方法
- Patent Title: Systems and methods for delivery of fluid-containing process material combinations
- Patent Title (中): 用于输送含流体的工艺材料组合的系统和方法
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Application No.: US12745748Application Date: 2008-12-08
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Publication No.: US08507382B2Publication Date: 2013-08-13
- Inventor: John E. Q. Hughes , Donald D. Ware , Steven M. Lurcott , Peter Wrschka
- Applicant: John E. Q. Hughes , Donald D. Ware , Steven M. Lurcott , Peter Wrschka
- Applicant Address: US AZ Tempe
- Assignee: Foresight Processing, LLC
- Current Assignee: Foresight Processing, LLC
- Current Assignee Address: US AZ Tempe
- Agency: Jenkins, Wilson, Taylor & Hunt, P.A.
- Agent Vincent K. Gustafson
- International Application: PCT/US2008/085826 WO 20081208
- International Announcement: WO2009/076276 WO 20090618
- Main IPC: H01L21/302
- IPC: H01L21/302

Abstract:
Common sources of different (e.g., concentrated) process materials are controllably supplied to multiple blending manifolds associated with multiple process tools, processing stations, or other points of use, to create an independently controllable process material blend for each tool, station, or point of use. Multi-constituent process materials may be circulated from a supply container through a blending manifold to a return container to ensure homogeneity until immediately prior to blending and use. Such containers may include liner-based containers adapted for pressure dispensation.
Public/Granted literature
- US20110008964A1 SYSTEMS AND METHODS FOR DELIVERY OF FLUID-CONTAINING PROCESS MATERIAL COMBINATIONS Public/Granted day:2011-01-13
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