Invention Grant
- Patent Title: Combined-source MOS transistor with comb-shaped gate, and method for manufacturing the same
- Patent Title (中): 具有梳形门的组合源MOS晶体管及其制造方法
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Application No.: US13318333Application Date: 2011-04-01
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Publication No.: US08507959B2Publication Date: 2013-08-13
- Inventor: Ru Huang , Qianqian Huang , Zhan Zhan , Yangyuan Wang
- Applicant: Ru Huang , Qianqian Huang , Zhan Zhan , Yangyuan Wang
- Applicant Address: CN Beijing
- Assignee: Peking University
- Current Assignee: Peking University
- Current Assignee Address: CN Beijing
- Agency: Bozicevic, Field & Francis LLP
- Agent Bret E. Field
- Priority: CN201110021444 20110119
- International Application: PCT/CN2011/072372 WO 20110401
- International Announcement: WO2012/097543 WO 20120726
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L21/00 ; H01L21/336

Abstract:
The present invention discloses a combined-source MOS transistor with a Schottky Barrier and a comb-shaped gate structure, and a method for manufacturing the same. The combined-source MOS transistor includes: a control gate electrode layer, a gate dielectric layer, a semiconductor substrate, a highly-doped source region and a highly-doped drain region, wherein a Schottky source region is connected to a side of the highly-doped source region which is far from a channel, one end of the control gate extends to the highly-doped source region, the extended gate region is an extension gate in a form of a comb-shaped and the original control gate region is a main gate; an active region covered by the extension gate is also a channel region, and is a substrate material; the highly-doped source region which is formed by highly doping is located on both sides of each comb finger of the extension gate; and a Schottky junction is formed at a location where the Schottky source region and the channel under the extension gate are located. As compared with an existing MOSFET, in the invention, a higher turn-on current, a lower leakage current and a steeper subthreshold slope may be obtained under the same process condition and the same active region size.
Public/Granted literature
- US20120181585A1 Combined-source Mos Transistor with Comb-shaped Gate, and Method for Manufacturing the Same Public/Granted day:2012-07-19
Information query
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