Invention Grant
US08508100B2 Surface acoustic wave element, surface acoustic wave device and methods for manufacturing the same 有权
表面声波元件,声表面波器件及其制造方法

Surface acoustic wave element, surface acoustic wave device and methods for manufacturing the same
Abstract:
A surface acoustic wave (“SAW”) element includes a substrate which is formed of a piezoelectric material, a plurality of first electrodes which are disposed on the substrate and separated from each other, a plurality of second electrodes which are disposed on the substrate and are separated from the first electrodes and are separated from each other, and oxide films which are disposed on the respective plurality of first electrodes and the plurality of second electrodes.
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