Invention Grant
- Patent Title: Inertial sensor
- Patent Title (中): 惯性传感器
-
Application No.: US13284752Application Date: 2011-10-28
-
Publication No.: US08508105B2Publication Date: 2013-08-13
- Inventor: Yun Sung Kang , Jung Won Lee , Jong Woon Kim , Seung Hun Han , Min Kyu Choi
- Applicant: Yun Sung Kang , Jung Won Lee , Jong Woon Kim , Seung Hun Han , Min Kyu Choi
- Applicant Address: KR Gyunggi-Do
- Assignee: Samsung Electro-Mechanics Co., Ltd
- Current Assignee: Samsung Electro-Mechanics Co., Ltd
- Current Assignee Address: KR Gyunggi-Do
- Agency: Ladas & Parry, LLP
- Priority: KR10-2011-0059656 20100620
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
Disclosed herein is an inertial sensor of the present invention. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 and surrounding the mass body 120, a piezoelectric material 140 formed above the membrane 110 and provided with a cavity 141 in a thickness direction, a sensing electrode 150 disposed in the cavity 141 and a driving electrode 160 disposed outside the cavity 141, whereby the thickness of the piezoelectric material 140 of the portion on which the sensing electrode 150 is disposed is formed to be thin, such that the sensitivity of the inertial sensor 100 can be improved.
Public/Granted literature
- US20120043855A1 Inertial Sensor Public/Granted day:2012-02-23
Information query
IPC分类: