Invention Grant
- Patent Title: Non-destructive signal propagation system and method to determine substrate integrity
- Patent Title (中): 非破坏性信号传播系统和方法确定衬底完整性
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Application No.: US12435934Application Date: 2009-05-05
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Publication No.: US08508239B2Publication Date: 2013-08-13
- Inventor: John Valcore
- Applicant: John Valcore
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: G01R23/20
- IPC: G01R23/20

Abstract:
In various exemplary embodiments described herein, a system and associated method relate to non-destructive signal propagation to detect one or more defects in a substrate. The system can be built into a semiconductor process tool such as a substrate handling mechanism. The system comprises a transducer configured to convert one or more frequencies from an electrical signal into at least one mechanical pulse. The mechanical pulse is coupled to the substrate through the substrate handling mechanism. A plurality of sensors is positioned distal to the transducer and configured to be coupled, acoustically or mechanically, to the substrate. The plurality of distal sensors is further configured to detect both the mechanical pulse and any distortions to the pulse. A signal analyzer is coupled to the plurality of distal sensors to compare the detected pulse and any distortions to the pulse with a baseline response.
Public/Granted literature
- US20100283482A1 NON-DESTRUCTIVE SIGNAL PROPAGATION SYSTEM AND METHOD TO DETERMINE SUBSTRATE INTEGRITY Public/Granted day:2010-11-11
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