Invention Grant
US08508745B2 System, method and apparatus for a micromachined interferometer using optical splitting
有权
使用光学分裂的微加工干涉仪的系统，方法和装置
- Patent Title: System, method and apparatus for a micromachined interferometer using optical splitting
- Patent Title (中): 使用光学分裂的微加工干涉仪的系统，方法和装置
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Application No.: US12849638Application Date: 2010-08-03
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Publication No.: US08508745B2Publication Date: 2013-08-13
- Inventor: Bassam A. Saadany , Diaa A. Khalil , Tarik E. Bourouina
- Applicant: Bassam A. Saadany , Diaa A. Khalil , Tarik E. Bourouina
- Applicant Address: EG Cairo
- Assignee: Si-Ware Systems
- Current Assignee: Si-Ware Systems
- Current Assignee Address: EG Cairo
- Agency: Garlick & Markison
- Agent Holly L Rudnick
- Main IPC: G01B9/02
- IPC: G01B9/02
Abstract:
A Mach-Zehnder MEMS interferometer is achieved using two half plane beam splitters formed at respective edges of a first medium. The first beam splitter is optically coupled to receive an incident beam and operates to split the incident beam into two beams, a first one propagating in the first medium towards the second beam splitter and a second one propagating in a second medium. A moveable mirror in the second medium reflects the second beam back towards the second beam splitter to cause interference of the two beams.
Public/Granted literature
- US20100315647A1 System, Method and Apparatus for a Micromachined Interferometer Using Optical Splitting Public/Granted day:2010-12-16
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