Invention Grant
US08508826B2 Meandering oscillator, optical reflecting element using meandering oscillator, and image projection device using meandering oscillator 有权
蜿蜒振荡器,使用蜿蜒振荡器的光学反射元件,以及使用曲折振荡器的图像投影装置

Meandering oscillator, optical reflecting element using meandering oscillator, and image projection device using meandering oscillator
Abstract:
A meandering oscillator includes a plurality of oscillating plates bent and coupled in predetermined directions and piezoelectric actuators each including a lower electrode, a piezoelectric body, and an upper electrode stacked on the oscillating plate in this order, and wherein the piezoelectric actuators are alternately arranged on the oscillating plates. Thus, even when an element is made smaller, electrodes can be easily arranged. As a result, the productivity can be improved.
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