Invention Grant
- Patent Title: Vibration-actuated micro mirror device
- Patent Title (中): 振动微镜装置
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Application No.: US13667093Application Date: 2012-11-02
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Publication No.: US08508827B2Publication Date: 2013-08-13
- Inventor: Yu-Jen Wang , Chien-Shien Yeh , Chung-De Chen , Hung-Chung Li
- Applicant: Yu-Jen Wang , Chien-Shien Yeh , Chung-De Chen , Hung-Chung Li
- Applicant Address: TW Hsin-Chu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsin-Chu
- Agency: WPAT, PC
- Agent Justin King
- Priority: TW99127428A 20100817
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
A vibration-actuated micro mirror device comprises a substrate, a swinging frame, a reflection mirror, and a vibration part. The swinging frame is rotatably arranged within a first accommodating space formed on the substrate. The reflection mirror is rotatably arranged within a second accommodating space formed on the swinging frame. The vibration part further comprises a plate coupled to the substrate, and a first and a second vibration structures. The first and the second vibration structures are coupled to the plate and are spaced a distance away from each other, wherein the first vibration structure receives a first driving signal having a first frequency and the second vibration structure receives a second driving signal having a second frequency smaller than the first frequency, thereby enabling the swinging frame to rotate about the first axis while enabling the reflection mirror to rotate about the second axis.
Public/Granted literature
- US20130057936A1 VIBRATION-ACTUATED MICRO MIRROR DEVICE Public/Granted day:2013-03-07
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