Invention Grant
- Patent Title: Piezoelectric micro speaker including annular ring-shaped vibrating membranes and method of manufacturing the piezoelectric micro speaker
- Patent Title (中): 压电式微型扬声器,包括环形振动膜和制造压电微型扬声器的方法
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Application No.: US12704029Application Date: 2010-02-11
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Publication No.: US08509462B2Publication Date: 2013-08-13
- Inventor: Byung-gil Jeong , Dong-kyun Kim , Seok-whan Chung , Jun-sik Hwang
- Applicant: Byung-gil Jeong , Dong-kyun Kim , Seok-whan Chung , Jun-sik Hwang
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2009-0087641 20090916
- Main IPC: H04R25/00
- IPC: H04R25/00

Abstract:
A piezoelectric micro speaker and a method of manufacturing the same are provided. The piezoelectric micro speaker includes a substrate having a cavity formed therein and a diaphragm that is disposed on the substrate that overlaps the cavity. A plurality of first vibrating membranes having concentric annular ring shapes are disposed in a first region of the diaphragm corresponding to a center of the cavity. A second vibrating membrane including a different material from that of the first vibrating membranes is formed in the second region of the diaphragm corresponding to an edge of the cavity. A piezoelectric actuator for vibrating the first vibrating membranes is formed on and between the concentric annular rings of the first vibrating membranes.
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