Invention Grant
- Patent Title: Substrate apparatus calibration and synchronization procedure
- Patent Title (中): 基板设备校准和同步程序
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Application No.: US13366968Application Date: 2012-02-06
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Publication No.: US08509938B2Publication Date: 2013-08-13
- Inventor: Alexander G. Krupyshev
- Applicant: Alexander G. Krupyshev
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: G06F19/00
- IPC: G06F19/00
Abstract:
A method for positioning substrates in a substrate processing apparatus having a substrate alignment device, a first substrate transport apparatus and a second substrate transport apparatus, includes calibrating the substrate alignment device with a motion of the first substrate transport apparatus, and calibrating a coordinate system of the second substrate transport apparatus with the substrate alignment device.
Public/Granted literature
- US20120136471A1 SUBSTRATE APPARATUS CALIBRATION AND SYNCHRONIZATION PROCEDURE Public/Granted day:2012-05-31
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