Invention Grant
- Patent Title: Wafer handling method and ion implanter
- Patent Title (中): 晶圆处理方法和离子注入机
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Application No.: US12938856Application Date: 2010-11-03
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Publication No.: US08519363B2Publication Date: 2013-08-27
- Inventor: Kohei Tanaka , Takashi Nogami , Masayoshi Hino
- Applicant: Kohei Tanaka , Takashi Nogami , Masayoshi Hino
- Applicant Address: JP Kyoto
- Assignee: Nissin Ion Equipment Co., Ltd.
- Current Assignee: Nissin Ion Equipment Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Osha Liang LLP
- Priority: JP2010-090087 20100409
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/20 ; H01J37/317

Abstract:
An ion implanter performs ion implantation by irradiating a wafer having a notch at its outer peripheral region by an ion beam. In ion implanter, a twist angle adjustment mechanism is configured to adjust a twist angle, an aligner is configured to adjust an alignment angle, a wafer transfer device is configured to transfer the wafer between the aligner and the twist angle adjustment mechanism, an image processing device is configured to detect the twist angle of the wafer on the twist angle adjustment mechanism, and a control device is configured to carry out a twist control in which the wafer is rotated by the twist angle adjustment mechanism by an angle obtained from a first difference between the detected twist angle and the alignment angle and a second difference between the alignment angle and a target twist angle given as one of ion implantation conditions.
Public/Granted literature
- US20110248190A1 WAFER HANDLING METHOD AND ION IMPLANTER Public/Granted day:2011-10-13
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