Invention Grant
US08522801B2 Method and apparatus for cleaning a semiconductor substrate 有权
用于清洁半导体衬底的方法和设备

Method and apparatus for cleaning a semiconductor substrate
Abstract:
A method for cleaning a substrate is provided. The method initiates with disposing a fluid layer having solid components therein to a surface of the substrate. A shear force directed substantially parallel to the surface of the substrate and toward an outer edge of the substrate is then created. The shear force may result from a normal or tangential component of a force applied to a solid body in contact with the fluid layer in one embodiment. The surface of the substrate is rinsed to remove the fluid layer. A cleaning system and apparatus are also provided.
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