Invention Grant
- Patent Title: Method and apparatus for cleaning a semiconductor substrate
- Patent Title (中): 用于清洁半导体衬底的方法和设备
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Application No.: US11612371Application Date: 2006-12-18
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Publication No.: US08522801B2Publication Date: 2013-09-03
- Inventor: Erik M. Freer , John M. deLarios , Katrina Mikhaylichenko , Michael Ravkin , Mikhail Korolik , Fred C. Redeker
- Applicant: Erik M. Freer , John M. deLarios , Katrina Mikhaylichenko , Michael Ravkin , Mikhail Korolik , Fred C. Redeker
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: B08B3/00
- IPC: B08B3/00

Abstract:
A method for cleaning a substrate is provided. The method initiates with disposing a fluid layer having solid components therein to a surface of the substrate. A shear force directed substantially parallel to the surface of the substrate and toward an outer edge of the substrate is then created. The shear force may result from a normal or tangential component of a force applied to a solid body in contact with the fluid layer in one embodiment. The surface of the substrate is rinsed to remove the fluid layer. A cleaning system and apparatus are also provided.
Public/Granted literature
- US20070084485A1 METHOD AND APPARATUS FOR CLEANING A SEMICONDUCTOR SUBSTRATE Public/Granted day:2007-04-19
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