Invention Grant
- Patent Title: Substrate storage pod with replacement function of clean gas
- Patent Title (中): 具有清洁气体替换功能的基材储存容器
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Application No.: US13035335Application Date: 2011-02-25
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Publication No.: US08522836B2Publication Date: 2013-09-03
- Inventor: Tsutomu Okabe , Toshihiko Miyajima
- Applicant: Tsutomu Okabe , Toshihiko Miyajima
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-041766 20100226
- Main IPC: B65B1/04
- IPC: B65B1/04

Abstract:
The substrate storage pod includes a pod case which includes a hollow inner space for storing a substrate, and an opening; a lid member which is capable of sealing the opening; an exhaust port for exhausting a replacement gas in the hollow inner space of the pod case; and an exhaust space which is defined in the hollow inner space so as to communicate to the exhaust port. The exhaust space is defined in the hollow inner space by a multi-hole partition member including multiple holes and by an inner surface of the pod case. In the substrate storage pod, back pressure on an exhaust side can be lowered, and hence dust in the pod can be collected to the exhaust side.
Public/Granted literature
- US20110210041A1 SUBSTRATE STORAGE POD WITH REPLACEMENT FUNCTION OF CLEAN GAS Public/Granted day:2011-09-01
Information query
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