Invention Grant
- Patent Title: Sensor device with improved sensitivity to temperature variation in a semiconductor substrate
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Application No.: US12072526Application Date: 2008-02-27
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Publication No.: US08523427B2Publication Date: 2013-09-03
- Inventor: Luke Alexander Pillans
- Applicant: Luke Alexander Pillans
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: G01K15/00
- IPC: G01K15/00 ; G01K17/06 ; G01K3/06 ; G01J5/02

Abstract:
A sensor device formed on a semiconductor substrate. The device comprises a thermal radiation sensor including a sensing cell and a referencing cell which are co-operable for providing a first output signal indicative of the temperature fluctuation resulting from incident radiation. A gradient sensor including a pair of cells spatially located on the semiconductor substrate is provided which are co-operable to provide a second output signal indicative of the temperature gradient across the semiconductor substrate for facilitating calibrating the first output signal. At least one of the cells of the gradient sensor is not common to the cells of the thermal radiation sensor.
Public/Granted literature
- US20090213895A1 Sensor device with improved sensitivity to temperature variation in a semiconductor substrate Public/Granted day:2009-08-27
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